Lee W, KIM C, LEE J, PARK S, ROH Y. The study on un-doped/boron doped/un-doped triple SEG in vertical NAND flash memory. J Met Mater Miner [Internet]. 2021 Dec. 16 [cited 2024 Apr. 25];31(4):40-4. Available from: https://jmmm.material.chula.ac.th/index.php/jmmm/article/view/1137