RATCHAYOTEE, P.; CHINGSUNGNOEN, A.; POOLCHARUANSIN, P. . Controlling titanium incorporation in hydrogenated amorphous carbon films via closed-loop feedback in reactive high power impulse magnetron sputtering. Journal of Metals, Materials and Minerals, Bangkok, Thailand, v. 34, n. 4, p. 2114, 2024. DOI: 10.55713/jmmm.v34i4.2114. Disponível em: https://jmmm.material.chula.ac.th/index.php/jmmm/article/view/2114. Acesso em: 20 nov. 2024.