Lee, Woong, Department of Electrical and Computer Engineering, Sungkyunkwan University, Korea; Diffusion Technology Team, Memory Manufacturing Technology, Samsung Electronics Co. Ltd., Korea, Korea, Republic of

• Journal of Metals, Materials and Minerals Vol. 31 No. 4 (2021) - Original Research Articles
  The study on un-doped/boron doped/un-doped triple SEG in vertical NAND flash memory
  Abstract  PDF