Characterization of diamond-like carbon (DLC) films deposited by filtered cathodic vacuum arc technique
Diamond-like carbon (DLC) films were prepared on AISI H13 hot-work tool steel substrates by filtered cathodic vacuum arc (FCVA) technique under variable substrate DC biasing. The atomic structures of the films were investigated by Raman spectroscopy, X-ray photoelectron spectroscopy, and near edge
x-ray absorption fine structure spectroscopy. The Raman spectra revealed that when the magnitude of the bias voltage increased, the G peak was shifted toward lower wave numbers, and indicated that the sp3 content in the DLC films increased. The ratios between the sp3 and sp2 bonds in the films were verified by X-ray photoelectron spectroscopy, and the analyses from near-edge x-ray absorption fine structure measurements demonstrated the mixture of the sp3, sp2 bonds together with C-O, C-H bonds, and the amorphous structure in the DLC films.
How to Cite
LicenseAuthors who publish with this journal agree to the following terms:
- Authors retain copyright and grant the journal right of first publication with the work simultaneously licensed under a Creative Commons Attribution License that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.
- Authors are able to enter into separate, additional contractual arrangements for the non-exclusive distribution of the journal's published version of the work (e.g., post it to an institutional repository or publish it in a book), with an acknowledgement of its initial publication in this journal.