Characterization of diamond-like carbon (DLC) films deposited by filtered cathodic vacuum arc technique

Authors

  • Natthaphong Konkhunthot School of Metallurgical Engineering, Institute of Engineering, Suranaree University of Technology
  • Chanan Euaruksakul Synchrotron Light Research Institute (Public Organization)
  • Pat Photongkam Synchrotron Light Research Institute (Public Organization)
  • Pornwasa Wongpanya School of Metallurgical Engineering, Institute of Engineering, Suranaree University of Technology

Keywords:

Filtered cathodic vacuum arc, Diamond-like carbon, Amorphous carbon film, Bias voltage

Abstract

Diamond-like carbon (DLC) films were prepared on AISI H13 hot-work tool steel substrates by filtered cathodic vacuum arc (FCVA) technique under variable substrate DC biasing. The atomic structures of the films were investigated by Raman spectroscopy, X-ray photoelectron spectroscopy, and near edge
x-ray absorption fine structure spectroscopy. The Raman spectra revealed that when the magnitude of the bias voltage increased, the G peak was shifted toward lower wave numbers, and indicated that the sp3 content in the DLC films increased. The ratios between the sp3 and sp2 bonds in the films were verified by X-ray photoelectron spectroscopy, and the analyses from near-edge x-ray absorption fine structure measurements demonstrated the mixture of the sp3, sp2 bonds together with C-O, C-H bonds, and the amorphous structure in the DLC films.

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Published

2013-06-30

How to Cite

[1]
N. Konkhunthot, C. Euaruksakul, P. Photongkam, and P. . Wongpanya, “Characterization of diamond-like carbon (DLC) films deposited by filtered cathodic vacuum arc technique”, J Met Mater Miner, vol. 23, no. 1, Jun. 2013.

Issue

Vol. 23 No. 1 (2013)

Section

Original Research Articles

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