Enhanced Raman spectroscopy analysis for contamination detection on microelectronic devices using gold nanoclusters grown by DC magnetron sputtering

Charin SEESOMDEE; Prompong  PIENPINIJTHAM; Pornchai  RAKPONGSIRI; Sukkaneste TUNGASMITA

doi:10.55713/jmmm.v33i3.1665

ผู้แต่ง

Charin SEESOMDEE International Program of Nanoscience and Technology, Graduated School, Chulalongkorn University, Bangkok, Thailand
Prompong PIENPINIJTHAM Department of Chemistry, Faculty of Science, Chulalongkorn University, Bangkok, Thailand
Pornchai RAKPONGSIRI Western Digital Storage Technologies (Thailand) Ltd., Phra Nakhon Si Ayutthaya, Thailand
Sukkaneste TUNGASMITA International Program of Nanoscience and Technology, Graduated School, Chulalongkorn University, Bangkok, Thailand; Department of Physics, Faculty of Science, Chulalongkorn University, Bangkok, Thailand

DOI:

https://doi.org/10.55713/jmmm.v33i3.1665

คำสำคัญ:

Surface-enhanced Raman scattering, Sputtering, Gold nanoclusters, Failure analysis

บทคัดย่อ

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ประวัติผู้แต่ง

Prompong PIENPINIJTHAM, Department of Chemistry, Faculty of Science, Chulalongkorn University, Bangkok, Thailand

Pornchai RAKPONGSIRI, Western Digital Storage Technologies (Thailand) Ltd., Phra Nakhon Si Ayutthaya, Thailand

Sukkaneste TUNGASMITA, International Program of Nanoscience and Technology, Graduated School, Chulalongkorn University, Bangkok, Thailand; Department of Physics, Faculty of Science, Chulalongkorn University, Bangkok, Thailand

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