Techniques to improve coating adhesion of superhard coatings
คำสำคัญ:
titanium diboride coating, magnetron sputtering, adhesion and micro-scratchบทคัดย่อ
This work addresses the development of different techniques in fabricating TiB2 coatings with increased adhesion to the substrate and with retained high hardness. Titanium diboride (TiB2) coatings were deposited on high-speed steel substrates by magnetron sputtering of a TiB2 target. Attempts to enhance the coating adhesion to the substrate of the TiB2 coatings by controlling the deposition conditions and parameters are presented, such as effect of substrate rotation; annealing temperature; using deposited Cr as an interlayer material and Ti/TiB2 multilayer system. The structure of the coatings was examined by X-ray diffraction, field-emission scanning electron microscopy, and atomic force microscopy. The coating hardness and coating-substrate adhesion were investigated by nanoindentation and micro-scratch tests. It was found that the adhesion of resultant TiB2 coatings was increased tremendously by stationary substrate during deposition; annealing at optimal temperature of 450°C; using Cr interlayer and increased alternate TiB2/Ti layers.Downloads
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