Effect of heating rate on morphology of anti-reflective TiO<sub>2</sub> film coated by sol-gel with polyethylene glycol
This research studies formation of thin porous TiO2 film prepared by Sol-gel process with spin coating. Polyethylene glycol with molecular weight of 6,000 g/mol (6kPEG) was used as a pore generating agent. The TiO2 film was calcination at 450°C for 1 hour with different heating rate. It was found that heating rate strongly affects on morphology of TiO2 film due to grain coalescence. The lower heating rate tends to cause more coalescence resulting in coarsening of both grain and pore size. With higher heating rate, film density can be increased due to lower number of pores. On the other hand, for dense TiO2 film without Polyethylene glycol (noPEG), heating rate does not affect on film morphology.
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