Formation of nano-crystalline chromium-zirconium nitride (Cr-Zr-N) film coating by DC unbalanced magnetron sputtering
คำสำคัญ:
Nano-crystalline, Cr-Zr-N, Magnetron sputtering, PVD, Film-coatingบทคัดย่อ
This research aimed to improve the properties of chromium nitride (CrN) film coatings by addition of zirconium (Zr) as the third element to form Cr-Zr-N ternary nitride. DC unbalanced magnetron sputtering method was used to form Cr-Zr-N film with various Zr/Zr + Cr atomic ratios. Mechanical properties, surface morphology and crystal structure of the film were investigated. In the research, Cr-Zr-N film were categorised into 3 types with different Zr amount: low zirconium, (Zr/Zr + Cr = 0.29), medium zirconium (Zr/Zr + Cr = 0.44), and high zirconium (Zr/Zr + Cr = 0.74). All Cr-Zr-N films exhibited nano-crystalline structures with lower surface roughnesses than those of crystalline CrN film. With Zr addition, the highest hardness of Cr-Zr-N coating layer increased to 1762.7HV, in the low Zr film. Likewise, Young’s modulus value increased from 213.9 GPa for the Cr-N film to 269.0 GPa for the low Zr film. Both surface hardness and Young’s modulus slightly decreased when the amount of Zr in the ternary Cr-Zr-N film increased. The nano-crystalline Cr-Zr-N film exhibited better adhesion comparing to the binary Cr-N film. Scratch test showed the increased critical load (LC1) from 1.91 N for the CrN film to 3.21 N for the ternary Cr-Zr-N film.
Downloads
เอกสารอ้างอิง
W. F. Smith, Structure and properties of engineering alloys. Mc. Graw Hill; U.S.A., 1993.
E. J. Miola, S.D. de Souza, M. Olzon-Dionysio, D. Spinelli, and C. A. dos Santos, “Nitriding of H-12 tool steel by direct –current and pulsed plasmas,” Surface and Coating Technology, vol. 116-119, pp. 347-351, 1999.
D. M. Mattox, Handbook of physical vapor deposition (PVD) processing. U.S.A.: Noyes publication, 1998.
K. Wasa, M. Kitabatake, and H. Adachi, Thin Film Materials Technology, New Jersey: William Andrew publishing, 2004.
A. Thakur, S. Gangopadhyay, K. P. Maity, and S. K. Sahoo, “Evaluation on effectiveness of CVD and PVD coated tools during dry machining of incoloy825,” Tribology Transactions, vol. 61, pp. 1048-1058, 2016.
A. Vadiraj, M. Kamaraj, and R.Gnanamorrthy, “Fretting wear studies on PVD TiN coated, ion implanted and thermally oxidized biomedical titanium alloys,” Surface Engineering, vol. 23, pp. 209-215, 2007.
L. E. Gil, S. Liscano, P. Goudeau, E. Le Bourhis, E. S.Puchi-Cabrera, and M. H. Staia, “Effect of TiAlN PVD coatings on corrosion performance of WC-6% Co,” Surface Engineering, vol. 26, pp. 562-566, 2010.
M. Beger, and M Larsson, “Mechanical properties of multilayer pvd Ti/TiB2 coatings,” Surface Engineering, vol. 16, pp. 122-126, 2000.
E. Zoestbergen, and J. Th. M. De Hosson, “Crack resistance of PVD coatings: Influence of surface treatment prior to deposition,” Surface Engineering, vol. 18, pp. 283-288, 2002.
G. S. Fox-Rabinovich, K. Yamamoto, B. D. Beake, I. S. Gershman, A. I. Kovalev, S.C. Veldhuis, M. H. Aguirre, G. Dosbaeva, and J. L. Endrino, “Hierarchical adaptive nano-structured PVD coatings for extreme tribological applications: the quest for nonequilibrium states and emergent behaviour,” Science and Technology of Advanced Materials, vol. 3, pp. 1-26, 2012.
A. Ehiasarian, W. D. Munz, L. Hultman, U. Helmersson, and I. Petrov, “High power pulsed magnetron sputtered CrNx films,” Surface and Coating Technology, vol. 163, pp. 267-272, 2003.
J. Mo, M. Zhu, A. Leyland, and A. Matthews, “Impact wear and abrasion resistance of CrN, AlCrN and AlTiN PVD coating,” Surface and Coating Technology, vol. 215, pp. 170-177, 2013.
N. Abukhshim, P. Mativenga, and M. Sheikh, “Heat generation and temperature prediction,” International Journal of Machine Tools and Manufacture, vol. 46, pp. 782-800, 2006.
T. Polcar, T. Kubart, R. Novak, and P. Stroky, “Comparison of tribological behavior of TiN, TiCN and CrN at elevated temperatures,” Surface and Coating Technology, vol. 193, pp. 192-199, 2005.
G. Bertrand, C. Savall, and C. Meunier, “Properties of reactively RF magnetron-sputtered chromium nitride coating,” Surface and Coating Technology, vol. 96, pp. 323-329, 1997.
D. Mercs, N. Bonasso, S. Naamane, J. M. Bordes, and C. Coddet, “Mechanical and tribological properties of Cr–N and Cr–Si–N coatings reactively sputter deposited,” Surface and Coating Technology, vol. 200, pp. 403-407, 2005.
S. M. Aouadi, K. C. Wong, K. A. R. Mitchell, F. Namavar, E. Tobin, D. M. Mihut, and S. L.Rohde, “Characterization of titanium chromium nitride nanocomposite protective coatings,” Applied Surface Science, vol. 229, pp. 387-394, 2004.
H. Hasegawa, M. Kawate, and T. Suzuki, “Effects of Al contents on microstructures of Cr1−X AlXN and Zr1−XAlXN films synthesized by cathodic arc method,” Surface and Coating Technology, vol. 200, pp. 2409-2413, 2005.
P. Hones, R. Sanjines, and F. Levy, “Sputter deposited chromium nitride based ternary compounds for hard coatings,” Thin Solid Films, vol. 332, pp. 240-246, 1998.
K. H. Lee, C. H. Park, Y. S. Yoon, and J. J. Lee, “Structure and properties of (Ti1−XCrX)N coatings produced by the ion-plating method,” Thin Solid Films, vol. 385, pp. 167-173, 2001.
J. J. Nainaparampil, J. S. Zabinski, and A. Korneyi-Both, “Formation and characterization of multiphase film properties of (Ti–Cr)N formed by cathodic arc deposition,” Thin Solid Films, vol. 333, pp. 99-94, 1998.
Z. T. Wu, Z. B. Qi, D. F. Zhang, B. B. Wei, and Z.C.Wang, “Evaluating the influence of adding Nb on microstructure, hardness and oxidation resistance of CrN coating,” Surface and Coating Technology, vol. 289, pp. 45-51, 2016.
D. Chaliampalias, N. Pliatsikas, E. Pavlidou, K. Kolaklieva, R. Kakanakov, N. Vouroutzis, P. Patsalas, E. K. Polychroniadis, K. Chrissafis, and G. Vourlias, “Compositionally gradient PVD CrAlSiN films: structural examination and oxidation resistance,” Surface Engineering, pp. 1-7, 2016.
Z. G. Zhang, O. Rapaud, N. Banosso, D. Mercs, C. Dong, and C. Coddet, “Microstructures and corrosion behaviors of Zr modified CrN coatings deposited by DC magnetron sputtering,” Vacuum, vol. 82, pp. 1332-1336, 2008.
S. M. Aouadi, T. Maeruf, R. D. Twesten, D. M. Mihut ,and S. L. Rohde, “Physical and mechanical properties of chromium zirconium nitride thin films Surface and Coating Technology, vol. 200, pp. 3411-1417, 2006.
G. Kim, B. Kim, S. Lee, and J. Hahn, “Structure and mechanical properties of Cr–Zr–N films synthesized by closed field unbalanced magnetron sputtering with vertical magnetron sources,” Surface and Coating Technology, vol. 200, pp. 1669-1675, 2005.
C. Chantharangsi, S. Denchitcharoen, S. Chaiyakun, and P. Limsuwan, “Structure and surface morphology of Cr-Zr-N thin films deposited by reactive dc magnetron sputtering,” Procedia Engineering, vol. 32, pp. 868-874, 2012.
K. Kim, H. Kim, J. La, and S. Lee, “Effects of interlayer thickness and the substrate material on the adhesion properties of CrZrN coatings,” Japanese Journal of Applied Physics, vol. 55, pp. 01AA02, 2016.
R. W. Harrison, and W. E. Lee, “Processing and properties of ZrC, ZrN and ZrCN ceramics: a review,” Advances in Applied Ceramics, vol. 115, pp. 294-307, 2016.
X. Shi, J. Zhang, and M. Sun, “Role of Zr in icosahedral forming in Cu–Zr metallic glasses,” Materials Letters, vol. 157, pp. 180-182, 2015.
M. Naka, M. Miyake, M .Maeda, I. Okamoto, and Y. Arata, “High corrosion resistance of amorphous Co-Cr-Mo-Zr alloys,” Scripta Materialia, vol. 17, pp. 1293-1297, 1983.
C. Chantharangsi, S. Denchitcharoen, S. Chaiyakun, and P. Limsuwan, “Structures, morphologies, and chemical states of sputter-deposited CrZrN thin films with various Zr contents,” Thin Solid Films, vol. 589, pp. 613-619, 2015.
M. Harmelin, J. Bigot, and M. Lasocka, Thermal stability of Cu-Zr-M glasses as a function of an average atomization enthalpy, in: S. Steeb, H. Warlimont (Eds.) Rapidly Quenched Metals, Elsevier, 1985, pp. 335-338.
M. Binnewies, and E. Milke, Thermochemical Data of Elements and Compounds, Weinheim :Wiley-VCH., 2002.
S. Khamseh, and H. Araghi, “A study of the oxidation behavior of CrN and CrZrN ceramic thin films prepared in a magnetron sputtering system,” Ceramics International, vol. 42, pp. 9988-9994, 2016.
O. Jiminez, M. Audronis, A. Leyland, M. Flores, E. Rodriquez, K Kanakis, and A Matthew, “Small grain size zirconium-based coatings deposited by magnetron sputtering at low temperatures,” Thin Solid films, vol. 591, pp. 149-155, 2015.
Z. Xin, S. Xiao-Hui, and Z. Dian-Lin, “Thickness dependence of grain size and surface roughness for dc magnetron sputtered Au films,” Chinese Physics B., vol. 19 pp. 086802, 2010.
W. C. Oliver, and G. M. Pharr, “An improved technique for
determining hardness and elastic modulus using load and displacement sensing indentation experiments,” Journal of Materials Research, vol. 7, pp. 1564-1583, 2011.
O. Maksakova, A. Pogrebnjak, and V. Beresnev, “Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr,” Uspehi Fiziki Metallov, vol. 19, pp. 25-48, 2018.
ดาวน์โหลด
เผยแพร่แล้ว
วิธีการอ้างอิง
ฉบับ
บท
การอนุญาต
ลิขสิทธิ์ (c) 2021 Journal of Metals, Materials and Minerals
This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
Authors who publish in this journal agree to the following terms:
- Authors retain copyright and grant the journal right of first publication with the work simultaneously licensed under a Creative Commons Attribution License that allows others to share the work with an acknowledgment of the work's authorship and initial publication in this journal.
- Authors are able to enter into separate, additional contractual arrangements for the non-exclusive distribution of the journal's published version of the work (e.g., post it to an institutional repository or publish it in a book), with an acknowledgment of its initial publication in this journal.
