Electrochromic property of tungsten trioxide films prepared by DC magnetron sputtering with oblique angle deposition and thermal oxidation

Authors

  • Chantana AIEMPANAKIT Division of Physics, Faculty of Science and Technology, Rajamangala University of Technology Thanyaburi, Pathumtani 12110, Thailand
  • Areeya CHANACHAI Department of Physics, Faculty of Science and Technology, Thammasat University, Prathumthani, 12121, Thailand
  • Nattaya KANCHAI Department of Physics, Faculty of Science and Technology, Thammasat University, Prathumthani, 12121, Thailand
  • Montri AIEMPANAKI Department of Physics, Faculty of Science, Silpakorn University, Nakhon Pathom, 73000, Thailand
  • Kamon AIEMPANAKIT Department of Physics, Faculty of Science and Technology, Thammasat University, Prathumthani, 12121, Thailand

Keywords:

Magnetron sputtering, WO3 film, OAD, Electrochromic, Thermal oxidation

Abstract

In this work, WO3 thin films were prepared in two steps: First, tungsten (W) films with thickness of 100-300 nm were deposited by DC magnetron sputtering with oblique angle deposition (OAD) technique at 0 and 85. Second, sputtered W films were annealed under air atmosphere at a temperature of 500℃ and different oxidation times for 1-3 h. The structure of WO3 thin films were examined by X-ray diffraction and field emission scanning electron microscope. In addition, the optical and electrochromic properties of the WO3 thin films were measured by a spectrophotometer before and after testing in potassium hydroxide electrolytes. The results showed that the OAD technique can enhance porosity and exert high oxidation in W films. The increase in film thickness and oxidation time indicated that the crystallinity of WO3 films increased. The condition of WO3 films for OAD at 85, thickness of 300 nm, and oxidation time of 1 h showed the best electrochromic property with the highest optical modulation and current density.

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Published

2021-06-27

How to Cite

[1]
C. AIEMPANAKIT, A. CHANACHAI, N. KANCHAI, M. AIEMPANAKI, and K. AIEMPANAKIT, “Electrochromic property of tungsten trioxide films prepared by DC magnetron sputtering with oblique angle deposition and thermal oxidation”, J. Met. Mater. Miner., vol. 31, no. 2, pp. 123-128, Jun. 2021.

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Original Research Articles