The effect of Pt and Pd decoration on SnO\(_{2}\) slant nanorods fabricated using DC magnetron sputtering with OAD technique for CO gas sensing applications

Nampueng PANGPAIBOON; Thitiporn KAEWYOU; Sethavut  DUANGCHAN; Kata  JARUWONGRUNGSEE; Manatsawee  SRIRAK; Tossaporn  LERTVANITHPHOL; Viyapol  PATTHANASETTAKUL; Tawee  POGFAY; Mati  HORPRATHUM; Saksorn  LIMWICHEAN

doi:10.55713/jmmm.v35i3.2322

Authors

Nampueng PANGPAIBOON Department of Industrial Physics and Medical Instrumentation, Faculty of Applied Science, King Mongkut's University of Technology North Bangkok, Bangkok, 10800, Thailand
Thitiporn KAEWYOU Department of Industrial Physics and Medical Instrumentation, Faculty of Applied Science, King Mongkut's University of Technology North Bangkok, Bangkok, 10800, Thailand
Sethavut DUANGCHAN Department of Industrial Physics and Medical Instrumentation, Faculty of Applied Science, King Mongkut's University of Technology North Bangkok, Bangkok, 10800, Thailand
Kata JARUWONGRUNGSEE National Electronics and Computer Technology Center (NECTEC), National Science and Technology Development Agency, Pathum Thani, 12120 Thailand
Manatsawee SRIRAK National Electronics and Computer Technology Center (NECTEC), National Science and Technology Development Agency, Pathum Thani, 12120 Thailand
Tossaporn LERTVANITHPHOL National Electronics and Computer Technology Center (NECTEC), National Science and Technology Development Agency, Pathum Thani, 12120 Thailand
Viyapol PATTHANASETTAKUL National Electronics and Computer Technology Center (NECTEC), National Science and Technology Development Agency, Pathum Thani, 12120 Thailand
Tawee POGFAY National Electronics and Computer Technology Center (NECTEC), National Science and Technology Development Agency, Pathum Thani, 12120 Thailand
Mati HORPRATHUM National Electronics and Computer Technology Center (NECTEC), National Science and Technology Development Agency, Pathum Thani, 12120 Thailand
Saksorn LIMWICHEAN National Electronics and Computer Technology Center (NECTEC), National Science and Technology Development Agency, Pathum Thani, 12120 Thailand

DOI:

https://doi.org/10.55713/jmmm.v35i3.2322

Keywords:

SnO2 slant nanorods, Pt Nanoparticles, Pd Nanoparticles, Oblique angle deposition, magnetron sputtering, CO gas sensor

Abstract

This research investigates the effect of Pt and Pd decoration on the structure of SnO₂ slant nanorods (SNRs) films produced using DC magnetron sputtering with Oblique Angle Deposition (OAD), as well as their impact on the films' physical properties and gas sensing applications. Pt and Pd were deposited onto the SnO₂ SNRs for the same duration of 20 s each. Following deposition, all the films were heat-treated temperature at 400℃ for 2 h. The characterization of both as-deposited and annealed films involved analyzing the physical morphology using FE-SEM and the crystal structure using GI-XRD. It was observed that the structure of the SnO₂ SNRs showed no significant differences before and after decoration. XRD analysis identified the crystalline structure of SnO₂ at the (110), (101), and (211) planes. After decoration, additional peaks corresponding to Pt at (111) and (200) and Pd at (111) were detected. Additionally, TEM mapping revealed that most of the deposited particles were largely concentrated on the top surface of the nanorods. Finally, testing for CO gas sensing performance revealed that the SnO₂ SNRs decorated with Pt demonstrated the highest sensitivity, detecting CO gas at concentrations as low as 50 ppm.

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