Effects of thickness on the performance of SnO\(_{2}\) gas sensors using low-temperature co-fired ceramic

Montri  AIEMPANAKIT; Kittiyaporn  SINGSUMPHAN; Chutima  NAKMUK; Cheewita  SUWANCHAWALIT; Manatsawee  SRIRAK; Kata  JARUWONGRUNGSEE; Anurat  WISITSORAAT; Monrudee  LIANGRUKSA; Chawarat SIRIWONG

doi:10.55713/jmmm.v35i1.2063

Authors

Montri AIEMPANAKIT Department of Physics, Faculty of Science, Silpakorn University, Nakhon Pathom, 73000 Thailand
Kittiyaporn SINGSUMPHAN Department of Physics, Faculty of Science, Silpakorn University, Nakhon Pathom, 73000 Thailand
Chutima NAKMUK Department of Physics, Faculty of Science, Silpakorn University, Nakhon Pathom, 73000 Thailand
Cheewita SUWANCHAWALIT Department of Chemistry, Faculty of Science, Silpakorn University, Nakhon Pathom, 73000 Thailand
Manatsawee SRIRAK Opto-Electrochemical Sensing Research Team (OEC), National Electronics and Computer Technology Center (NECTEC), National Science and Technology Development Agency (NSTDA), Pathum Thani, 12120 Thailand
Kata JARUWONGRUNGSEE Opto-Electrochemical Sensing Research Team (OEC), National Electronics and Computer Technology Center (NECTEC), National Science and Technology Development Agency (NSTDA), Pathum Thani, 12120 Thailand
Anurat WISITSORAAT National Security and Dual-Use Technology Center (NSD), National Science and Technology Development Agency (NSTDA), Pathum Thani, 12120 Thailand
Monrudee LIANGRUKSA National Nanotechnology Center (NANOTEC), National Science and Technology Development Agency (NSTDA), Pathum Thani 12120, Thailand
Chawarat SIRIWONG Department of Physics, Faculty of Science, Silpakorn University, Nakhon Pathom, 73000 Thailand

DOI:

https://doi.org/10.55713/jmmm.v35i1.2063

Keywords:

SnO2 nanoparticles, thickness, Low-temperature co-fired ceramic (LTCC), Gas sensors

Abstract

This study develops SnO₂-based gas sensors integrated with a low-temperature co-fired ceramic (LTCC) micro hotplate for ethanol detection. SnO₂ nanoparticles were synthesized using a simple precipitation method, and sensing layers with varying thicknesses around 0.24 µm, 0.71 µm, and 1.20 µm were applied to evaluate their influence on performance. The results show that the optimal configuration is a 0.71 µm layer, offering high sensitivity, fast response, and efficient recovery. Operating at a low voltage of 3.2 V, the sensors exhibit low power consumption, suitable for portable and battery-operated applications. The gas-sensing mechanism relies on changes in resistance due to interactions between ethanol molecules and oxygen species adsorbed on the SnO₂ surface, with the optimal sensor showing superior selectivity for ethanol (C₂H₅OH) over other gases, including hydrogen sulfide (H₂S), ammonia (NH₃), acetone (C₃H₆O), and nitric oxide (NO). The structural and electrical properties of the SnO₂ layers, combined with the efficiency of the LTCC micro hotplate platform, contribute to stable sensing performance. This research highlights the importance of thickness optimization to balance sensitivity and response. The proposed sensor offers a low-cost, energy-efficient solution for ethanol monitoring, with potential enhancements through material doping, multi-gas detection, and IoT integration.

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